计算光刻作为现代芯片制造光刻环节的核心技术之一，其发展经历了从规则导向到模型驱动的转变。然而，随着制程迈向7nm乃至5nm节点，传统方法因规则局限、优化自由度不足等制约，难以满足复杂芯片设计的高要求。在此背景下，反向光刻技术（ILT）以其独特的优化思路应运而生。
ILT即从目标芯片图案出发，逆向推导获得最优化掩模图案，极大地提升优化的灵活性和精准度，更能满足先进制程对图形精度的苛刻需求。因此，在探索7nm及以下制程的征途中，ILT技术无疑将是提升制造良率的关键技术。尤其在jianduan光刻设备受限的国内环境下，其重要性更是不言而喻。
ILT并非一种新兴技术，但其存在诸如计算量大效率低，掩模复杂度高难于制造等技术难点，长期以来尚未得到广泛应用。作为探索ILT技术的先驱之一，东方晶源ILT采用GPU集群高性能计算解决方案，解决了计算量大的难题，率先实现了全芯片级别的基于ILT技术的掩模优化。面对7/5nm等先进制程的迫切需求，近期东方晶源ILT解决方案又成功攻克众多技术难题，包括优化收敛性、结果一致性、人工智能加速、掩模复杂度重整化等，目前正在国内各大Fab厂商加紧验证。
革新后的东方晶源ILT解决方案其主要特点及优势体现在以下几个方面：
独创的混合掩模优化方法，显著降低计算复杂度，提升整体计算效率，特别是在优化辅助曝光信号的同时考虑三维掩模效应，提供更为精准的掩模结果。
引入人工智能技术进一步解决ILT所需运算时间长的弊端，其深度学习模型预测结果与ILT计算结果相似度高达95%，同时获得近十倍的提速。
支持矩形图形（Rectangle）、曼哈顿图形（Manhattan）以及曲线图形（Curvilinear）的不同复杂度掩模设计，适应不同客户及应用场景需求。
图 1人工智能赋能东方晶源全芯片ILT解决
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BILZ PVM 032 KS High Precision Mechanical Pneumatic Level Control
Elmo Motion Control FLU-10/100 FiconTEC 142475 Servo Amplifier
MICRO-EPSILON DT621 4105002 Capa NCDT Series 600
ATOS Engineering I/O-System PIOC POWER-48.1/E8 Module
DINA ELEKTRONIK DNDS PMG IDNo: 10PG00 DNDS 1EG V7C ID-No: 22EG36 Base
HOYA EXECURE-H-1VC UV-LED Cure Light Source BC2 2x 3B LED 300mW at 365nm
HACH Ultra Analytics 2084530-01 Rev V 2084531
PROFACE GP47J-EG11 Touch Screen Panel Digital GP070-CN10-O Connector 40058
PROFACE GP47J-EG11 Touch Screen Panel Digital GP070-CN10-O Connector 40050
Hamamatsu A4455 4-UV Output Quartz Fiber Guide
Oriental Motor SPW40B10-6K S-Line Servo Motor
Chuo Seiki TV-LE 6662 TS-H M22300 50mm 15mm 1X 0.03 Lens WAT-250D
OMRON F3SN-A0187P25-L / D SAFETY LIGHT CURTAIN CONTROL Type 4,
Axxon D-260 Simple and Smart Dispensing Adapter
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IAI RCA2-TCA3NA-I-10-2-30-A5-P Actuator ACON-CA-10I-EP-0-0-ABU Controller
DELAB TM-9000S-U240C-1A Combine Over Current Earth Fault Relay
DELAB TM-9000S-U240C-1A Combine Over Current Earth Fault Relay Module
Tatra Pak 67379-269 Transformer Version AC
Glentek GA375-2VM-YAXIS P/N: WD-16957-001 Servo Controller
SIGMA KOKI P-25ACTR-B0 Vexta PK513PB-C9 Stepper Motor Cable
MELEC KP1445-0A KP1445-0B GDB-5F30 V1 Stepping Motor Driver
MELEC KP1401-1E KP1401-1F GDB-5F40 Stepping Motor Driver
Digital Instruments DT225 Pad Control
Navitar 1-6010 1X Adapter 1-6015 1-60123 Sony XC-HR50 CCD Body Her
ASEM MODC4 REV.DM SEB083841M2RS232-021 M2RS232 PCB Board
Navitar 1-60937 ESEC 0.75X 1-6011DM S2X Adapter II 1-6233 0.5X 1-60110
Chuo Seiki TV-LE Microscope 50mm CL 1X 0.03 Lens 15mm CF WAT-250D
Tamagawa TS4602N1384E100 TBL-i II AC Servo Motor xx560
Tamagawa TS4602N1384E100 TBL-i II AC Servo Motor xx556
WOODHEAD SST DN4-PCU-H V2.1.0 PCI Card
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IAI RCA2-TCA3NA-I-10-2-30-A5-P Actuator ACON-CA-10I-EP-0-0-ABU Controller 24V
Tamagawa TS4602N1384E100 TBL-i II AC Servo Motor
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Kyowa WGA-670A-0 Instrumentation Amplifier
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Elobau 462 121 H1 Security Evaluation it
PHILIPS 4022 530 06281 CCD Video Camera Sony XC-75
Aerotech BM130E-ES15640 Servo Motor
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Mitsubishi GT1575-STBA Graphic Operation Terminal Touch Screen GOT1000
Danaher Precision Stage Linear Screw Actuator API Gettys 23D-6102BN Encoder
IMS Intelligent Motion Systems IM483-PLG Microstepping Driver
Panasonic MSMZ042A1F AC Servo Motor 400W
方案
图 2PanGen ILT®支持生成不同复杂度的掩模图形
图 3 PanGen ILT®结果相比传统OPC结果工艺窗口增大超过10%
东方晶源自2014年成立以来，在计算光刻领域持续创新，构建了全面且lingxian的技术体系，旗下计算光刻平台PanGen®已经形成八大产品矩阵，包括Model、DRC、SBAR、OPC、LRC、DPT、SMO、DMC，具备完整的计算光刻相关EDA工具链条，并已在国内各大Fab厂商广泛应用，量产掩模超6000张。随着ILT解决方案的不断革新，其在效率和性能上的优势更加突显，必将在先进制程研发和应用中发挥重要作用，在提升良率、降低生产成本方面展现出独特的价值。展望未来，东方晶源将持续坚持技术创新，提供zhuoyue的解决方案，为我国半导体产业的发展和进步贡献智慧和力量。